Sergiy Yulin: search on Z-Library

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1

Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications

Müller, Robert, Yulin, Sergiy, Naujok, Philipp, Kaiser, Norbert, Tünnermann, Andreas

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 992 KB

english, 2017

2

Optical and Structural Characteristics of Ion-Plated Nb2O5 and HfO2 Films

Antje Hallbauer, Daniel Huber, Frederik Klauser, Andrea Kunz, Richard Tessadri, Ute Kaiser, Sergiy Yulin, Hans K. Pulker

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 206 KB

english, 2007

3

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Advances in X-Ray/EUV Optics and Components III - Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Feigl, Torsten, Goto, Shunji, Khounsary, Ali M., Yulin, Sergiy, Perske, Marco, Morawe, Christian, Pauer, Hagen, Schürmann, Mark, Kaiser, Norbert, Böwering, Norbert R., Khodykin, Oleg V., Fomenkov, Igo

Year:

2008

Language:

english

File:

PDF, 632 KB

english, 2008

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - Optical performance of LPP multilayer collector mirrors

Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Yulin, Sergiy, Trost, Marcus, Schröder, Sven, Duparré, Angela, Kaiser, Norbert, Tünnermann, Andreas, Böwering, Norbert R., Ershov, Alex I.

Year:

2012

Language:

english

File:

PDF, 5.22 MB

english, 2012

5

[OSA Optical Interference Coatings - Tucson, Arizona (2016..-..)] Optical Interference Coatings 2016 - Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering

Trost, Marcus, Schröder, Sven, Yulin, Sergiy, Duparré, Angela

Year:

2016

Language:

english

File:

PDF, 527 KB

english, 2016

6

Damage Resistant and Low Stress EUV Multilayer Mirrors

Feigl, Torsten, Yulin, Sergiy, Kuhlmann, Thomas, Kaiser, Norbert

Journal:

Japanese Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 424 KB

english, 2002

7

Interface characterization in B-based multilayer mirrors for next generation lithography

Naujok, Philipp, Yulin, Sergiy, Müller, Robert, Kaiser, Norbert, Tünnermann, Andreas

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 319 KB

english, 2016

8

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in X-Ray/EUV Optics and Components II - High-performance multilayer coatings for 106 nm

Taracheva, Elena, Khounsary, Ali M., Morawe, Christian, Yulin, Sergiy, Feigl, Torsten, Goto, Shunji, Kaiser, Norbert

Year:

2007

Language:

english

File:

PDF, 405 KB

english, 2007

9

SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Advanced Microlithography Technologies - EUV/soft x-ray multilayer optics

Yulin, Sergiy A., Feigl, Torsten, Benoit, Nicolas, Kaiser, Norbert, Wang, Yangyuan, Yao, Jun-en, Progler, Christopher J.

Year:

2005

Language:

english

File:

PDF, 630 KB

english, 2005

10

Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser

Bleiner, Davide, Yulin, Sergiy, Martynczuk, Julia, Ruiz-Lopez, Mabel, Arbelo, Yunieski, Balmer, Jürg E., Günther, Detlef

Journal:

Year:

2014

Language:

english

File:

PDF, 1.23 MB

english, 2014

11

SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - High-performance Cr/Sc multilayers for the soft x-ray range

Yulin, Sergiy, Amra, Claude, Kaiser, Norbert, Feigl, Torsten, Kaiser, Norbert, Macleod, H. Angus

Year:

2005

Language:

english

File:

PDF, 520 KB

english, 2005

12

Extreme-ultraviolet-induced oxidation of Mo/Si multilayers

Benoit, Nicolas, Schröder, Sven, Yulin, Sergiy, Feigl, Torsten, Duparré, Angela, Kaiser, Norbert, Tünnermann, Andreas

Journal:

Year:

2008

Language:

english

File:

PDF, 10.77 MB

english, 2008

13

SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 18 April 2011)] Damage to VUV, EUV, and X-ray Optics III - Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS

Schürmann, Mark, Juha, Libor, Bajt, Saša, Yulin, Sergiy, Nesterenko, Viatcheslav, London, Richard A., Feigl, Torsten, Kaiser, Norbert, Tkachenko, Boris, Schürmann, Max C.

Year:

2011

Language:

english

File:

PDF, 649 KB

english, 2011

14

Interface-engineered EUV multilayer mirrors

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 239 KB

english, 2006

15

Effect of anomalous transmittance in EUV multilayer optics

Igor Kozhevnikov, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Journal:

Optics Communications

Year:

2008

Language:

english

File:

PDF, 375 KB

english, 2008

16

Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications

Faradzhev, Nadir S., Yakshinskiy, Boris V., Starodub, Elena, Madey, Theodore E., Hill, Shannon B., Grantham, Steven, Lucatorto, Thomas B., Yulin, Sergiy, Vescovo, Elio, Keister, Jeffrey W.

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 2.42 MB

english, 2011

17

SPIE Proceedings [SPIE Boulder Damage Symposium XXXVI - Boulder, CO (Monday 20 September 2004)] Laser-Induced Damage in Optical Materials: 2004 - New challenges for VUV-XUV radiation resistant coatings

Gatto, Alexandre, Exarhos, Gregory J., Guenther, Arthur H., Heber, Joerg, Yang, Minghong, Kaiser, Norbert, Lewis, Keith L., Benoit, Nicolas, Yulin, Sergiy A., Soileau, M. J., Stolz, Christopher J., Fe

Year:

2004

Language:

english

File:

PDF, 239 KB

english, 2004

18

SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Amsterdam, Netherlands (Sunday 1 July 2012)] Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II - Optical reflector coatings for astronomical applications from EUV to IR

Schürmann, Mark, Navarro, Ramón, Cunningham, Colin R., Jobst, Paul Johannes, Yulin, Sergiy, Prieto, Eric, Feigl, Torsten, Heiße, Hanno, Wilbrandt, Steffen, Stenzel, Olaf, Gebhardt, Andreas, Risse, Ste

Year:

2012

Language:

english

File:

PDF, 792 KB

english, 2012

19

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - At-wavelength metrology on Sc-based multilayers for the UV and water window

Schaefers, Franz, Duparre, Angela, Singh, Bhanwar, Yulin, Sergiy A., Feigl, Torsten, Kaiser, Norbert

Year:

2003

Language:

english

File:

PDF, 501 KB

english, 2003

20

SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - EUV multilayer mirrors with enhanced stability

Benoit, Nicolas, Khounsary, Ali M., Morawe, Christian, Yulin, Sergiy, Feigl, Torsten, Kaiser, Norbert

Year:

2006

Language:

english

File:

PDF, 907 KB

english, 2006

21

Optical properties of unprotected and protected sputtered silver films: Surface morphology vs. UV/VIS reflectance

Jobst, Paul Johannes, Stenzel, Olaf, Schürmann, Mark, Modsching, Norbert, Yulin, Sergiy, Wilbrandt, Steffen, Gäbler, Dieter, Kaiser, Norbert, Tünnermann, Andreas

Journal:

Advanced Optical Technologies

Year:

2014

Language:

english

File:

PDF, 3.12 MB

english, 2014

22

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - High-temperature multilayers

Yulin, Sergiy, Mackay, R. Scott, Benoit, Nicolas, Feigl, Torsten, Kaiser, Norbert

Year:

2005

Language:

english

File:

PDF, 770 KB

english, 2005

23

Radiation stability of EUV Mo/Si multilayer mirrors

Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Journal:

Physica B: Condensed Matter

Year:

2005

Language:

english

File:

PDF, 268 KB

english, 2005

24

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Emerging Lithographic Technologies X - High-temperature LPP collector mirror

Feigl, Torsten, Lercel, Michael J., Yulin, Sergiy, Benoit, Nicolas, Kaiser, Norbert, Böwering, Norbert R., Ershov, Alex I., Khodykin, Oleh V., Viatella, John, Bruzzone, Kent, Fomenkov, Igor V., Myers,

Year:

2006

Language:

english

File:

PDF, 1.39 MB

english, 2006

25

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - Enhanced reflectivity and stability of Sc/Si multilayers

Yulin, Sergiy A., Schaefers, Franz, Feigl, Torsten, Kaiser, Norbert, Khounsary, Ali M., Dinger, Udo, Ota, Kazuya

Year:

2004

Language:

english

File:

PDF, 477 KB

english, 2004

26

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Emerging Lithographic Technologies XII - Mo/Si multilayers with enhanced TiO 2 - and RuO 2 -capping layers

Yulin, Sergiy, Schellenberg, Frank M., Benoit, Nicolas, Feigl, Torsten, Kaiser, Norbert, Fang, Ming, Chandhok, Manish

Year:

2008

Language:

english

File:

PDF, 1.03 MB

english, 2008

27

Optical and structural properties of Nb2O5–SiO2 mixtures in thin films

Vesna Janicki, Jordi Sancho-Parramon, Sergiy Yulin, Marcel Flemming, Andrey Chuvilin

Journal:

Surface and Coatings Technology

Year:

2012

Language:

english

File:

PDF, 1.25 MB

english, 2012

28

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Lifetime and refurbishment of multilayer LPP collector mirrors

Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Yulin, Sergiy, Kaiser, Norbert, Tünnermann, Andreas, Bowering, Norbert R., Ershov, Alex I., de Dea, Silvia, Hoffmann, Kay, La Fontaine, Br

Year:

2013

Language:

english

File:

PDF, 1.70 MB

english, 2013

29

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Multi-technique study of carbon contamination and cleaning of Mo/Si mirrors exposed to pulsed EUV radiation

La Fontaine, Bruno M., Schürmann, Mark, Yulin, Sergiy, Nesterenko, Viatcheslav, Feigl, Torsten, Kaiser, Norbert, Tkachenko, Boris, Schürmann, Max C.

Year:

2010

Language:

english

File:

PDF, 351 KB

english, 2010

30

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Spectral reflectance tuning of EUV mirrors for metrology applications

Yulin, Sergiy A., Kuhlmann, Thomas, Feigl, Torsten, Kaiser, Norbert, Engelstad, Roxann L.

Year:

2003

Language:

english

File:

PDF, 306 KB

english, 2003

31

Kollektorbeschichtungen für die EUV-Lithografie : Atomlagengenaue Mo/Si Interferenzschichtsysteme

Marco Perske, Hagen Pauer, Sergiy Yulin, Marcus Trost, Sven Schröder, Angela Duparré, Torsten Feigl, Norbert Kaiser

Journal:

Vakuum in Forschung und Praxis

Year:

2010

Language:

german

File:

PDF, 1005 KB

german, 2010

32

SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Advances in Optical Thin Films III - High performance EUV multilayer optics

Kaiser, Norbert, Yulin, Sergiy, Perske, Marco, Feigl, Torsten, Kaiser, Norbert, Lequime, Michel, Macleod, H. Angus

Year:

2008

Language:

english

File:

PDF, 2.38 MB

english, 2008

33

SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - Interface-engineered multilayer mirrors

Yulin, Sergiy, Amra, Claude, Kaiser, Norbert, Benoit, Nicolas, Feigl, Torsten, Macleod, H. Angus, Kaiser, Norbert

Year:

2005

Language:

english

File:

PDF, 412 KB

english, 2005

34

EUV multilayer optics

Torsten Feigl, Sergiy Yulin, Nicolas Benoit, Norbert Kaiser

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 250 KB

english, 2006

35

SPIE Proceedings [SPIE Optical Systems Design - St. Etienne, France (Tuesday 30 September 2003)] Advances in Optical Thin Films - EUV and soft x-ray multilayer optics

Kaiser, Norbert, Yulin, Sergiy, Feigl, Torsten, Bernitzki, Helmut, Lauth, Hans, Amra, Claude, Kaiser, Norbert, Macleod, H. Angus

Year:

2004

Language:

english

File:

PDF, 1.05 MB

english, 2004

36

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] X-Ray Mirrors, Crystals, and Multilayers II - Thermal stability of Cr/Sc multilayers for the soft x-ray range

Yulin, Sergiy A., Kuhlmann, Thomas, Feigl, Torsten, Kaiser, Norbert, Freund, Andreas K., Macrander, Albert T., Ishikawa, Tetsuya, Wood, James L.

Year:

2002

Language:

english

File:

PDF, 754 KB

english, 2002

37

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - High-performance Cr/Sc multilayers for the soft x-ray range

Yulin, Sergiy A., Schaefers, Franz, Feigl, Torsten, Kaiser, Norbert, Khounsary, Ali M., Dinger, Udo, Ota, Kazuya

Year:

2004

Language:

english

File:

PDF, 410 KB

english, 2004

38

La/B_4C multilayer mirrors with an additional wavelength suppression

Naujok, Philipp, Yulin, Sergiy, Bianco, Anna, Mahne, Nicola, Kaiser, Norbert, Tünnermann, Andreas

Journal:

Year:

2015

Language:

english

File:

PDF, 995 KB

english, 2015

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